Product Code : EM-YF3-5N-Cu
Yttrium Fluoride (YF3) is a high purity refractory material typically used as an evaporation source in Physical Vapor Deposition (PVD) processes. It is an ionic, white to yellow-white crystal with cubic and hexagonal crystal structures. It has a melting point of 1414 °C,making it ideal for thermal evaporation in wide range of applications in the semiconductor, display, and optical industries. Compared to other fluoride materials, YF3's higher melting point, low vapor pressure, and excellent purity make it well-suited for PVD processes requiring high temperature thermal evaporation. This material is most frequently used for deposition of multi-layer dielectric or conductive coatings, as well as for forming optical or dielectric lenses.
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Product Information
Yttrium Fluoride (YF3) is a high purity refractory material typically used as an evaporation source in Physical Vapor Deposition (PVD) processes. It is an ionic, white to yellow-white crystal with cubic and hexagonal crystal structures. It has a melting point of 1414 °C,making it ideal for thermal evaporation in wide range of applications in the semiconductor, display, and optical industries. Compared to other fluoride materials, YF3's higher melting point, low vapor pressure, and excellent purity make it well-suited for PVD processes requiring high temperature thermal evaporation. This material is most frequently used for deposition of multi-layer dielectric or conductive coatings, as well as for forming optical or dielectric lenses.
Material Type: Yttrium Fluoride
Symbol: YF3
13709-49-4
Yttrium Fluoride (YF3) Evaporation Material Specification
Size：Pellet / Wire / Rod / Slug / Tablet / Customized
Per your request or drawing
We can customized as required
Properties（Theoretical）
| Compound Formula | F3Y |
| Molecular Weight | 145.9 |
| Appearance | White powder |
| Melting Point | 1387 °C |
| Boiling Point | 2230 °C, 2503 K, 4046 °F |
| Density | 4.01 g/cm3 |
| Solubility in H2O | N/A |
| Exact Mass | 145.901 g/mol |
| Monoisotopic Mass | 145.901 Da |
Application of Yttrium Fluoride (YF3) Evaporation Material
• Used in deposition processes including semiconductor deposition, chemical vapor deposition (CVD) and physical vapor deposition (PVD)
• Used for optics including wear protection, decorative coatings, and displays.
Packing of Yttrium Fluoride (YF3) Evaporation Material
Standard Packing:
Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes Special package is available on request. They are vacuum sealed. The MSDS and Material Certification Sheets will be packed with the product.
ATTs’Yttrium Fluoride (YF3) Evaporation Material is carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.
Chemical Identifiers
| Linear Formula | YF3 |
| MDL Number | MFCD00049714 |
| EC No. | 237-257-5 |
| Beilstein/Reaxys No. | N/A |
| Pubchem CID | 83679 |
| IUPAC Name | Trifluoroyttrium |
| SMILES | F[Y](F)F |
| InchI Identifier | InChI=1S/3FH.Y/h3*1H;/q;;;+3/p-3 |
| InchI Key | RBORBHYCVONNJH-UHFFFAOYSA-K |
